
晶圓雷射刻號機
Specification |
> 100 WPH, base on |
1. OCR code (SEMI M12, M13, with SEMI Checksum) |
1. Dot diameter: 100um +/- 10u 2. Depth> 50um achievable |
Class 1 |
Vacuum chuck type |
|
|
|
Specification |
> 100 WPH, base on |
1. OCR code (SEMI M12, M13, with SEMI Checksum) |
1. Dot diameter: 100um +/- 10u 2. Depth> 50um achievable |
Class 1 |
Vacuum chuck type |
|
|
|