晶圓雷射刻號機
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Specification |
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> 100 WPH, base on |
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1. OCR code (SEMI M12, M13, with SEMI Checksum) |
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1. Dot diameter: 100um +/- 10u 2. Depth> 50um achievable |
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Class 1 |
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Vacuum chuck type |
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|
|
Specification |
|
> 100 WPH, base on |
|
1. OCR code (SEMI M12, M13, with SEMI Checksum) |
|
1. Dot diameter: 100um +/- 10u 2. Depth> 50um achievable |
|
Class 1 |
|
Vacuum chuck type |
|
|
|
|
|
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